Compulsory (obligatory) subjects (50 credits):
- Semiconductor Physics / Nanostructures (semester 2, lecture/seminar)
- Design of Heterogeneous Systems (semester 2, lecture/seminar/lab)
- Technologies for Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
- Advanced Integrated Circuit Technology (semester 2, lecture/seminar)
- Microsystems Design (semester 1, lecture/seminar/lab)
- Micro and Nano Devices (semester 1, lecture/seminar/lab)
- Reliability of Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
- Materials in Micro and Nano Technologies (semester 1, lecture/seminar)
- Smart Sensor Systems (semester 1, lecture/seminar/lab)
Elective (optional) subjects:
Students have to elect and pass subjects from the following catalogue in order to earn 20 credit points (CP):
- Microscopy and Analysis on the Nano Scale (semester 2, lecture/seminar) – 5 CP
- Surfaces, Thin Films and Interfaces (semester 3, lecture/seminar) – 5 CP
- Optoelectronic Devices (semester 3, lecture) – 5 CP
- Power Semiconductor Devices (semester 3, lecture/seminar) – 7 CP
- Test of Digital and Mixed-Signal Circuits (semester 1, lecture/seminar) – 5CP
- Fields and Waves (semester 2, lecture/seminar) – 5 CP
- Next Generation Internet (semesters 1 & 2, lecture) – 5 CP
- Advanced Mobile Networks (semesters 1 & 2, lecture/seminar) – 5 CP
- Micro Optical Systems (semester 2, lecture/seminar) – 3 CP
- Integrated Circuit Design – Transistor Level (semester 2, lecture/seminar/lab) – 5 CP
- Numerical Methods for Materials and Reliability of Micro and Nano Systems (semester 2, lecture/seminar) – 5 CP
- Failure Analytical Methods for Micro and Nano Systems (semester 3, lecture/seminar) – 5 CP
- Flexible Electronics (semester 2, lecture/seminar) – 5 CP
- Modern Battery Materials (semester 2, lecture/seminar) – 5 CP
- Automotive Sensor Systems (semester 2, lecture/seminar) – 5 CP
- Sensor Signal Evaluation Modern Battery Materials (semester 3, lecture/seminar) – 5 CP
Research project (obligatory, to be done at the university) – semester 3 – 20 CP
Master's thesis (obligatory, to be done at the university) – semester 4 – 30 CP