International Programmes 2026/2027

Micro and Nano Systems Micro and Nano Systems

Chemnitz University of Technology • Chemnitz

Degree
Master of Science
Course location
Chemnitz
Teaching language
  • English
Languages

Courses are held in English (100%).

Programme duration
4 semesters
Beginning
Winter semester
Application periods
The following is valid for applicants from: all countries
For the winter semester:
1 April - 15 July
More information on application periods
Please find more details on this website.
Combined Master's degree / PhD programme
No
Joint degree / double degree programme
No
Description/content

This English-language Master's programme covers a wide range of subjects with a focus on future challenges in the fields of micro and nano systems.
The courses provide world-class, future-oriented education in design, manufacturing, characterisation and integration of miniaturised components into engineering systems. The interdisciplinary courses cover fundamental theoretical knowledge in physics and engineering but also application-oriented skills in developing innovative electronic and micro mechanic semiconductor components. Courses and practical training (labs) address current and prospective needs of industrial and academic research.

The programme is targeted at the following students:

  • Students with a BSc in Electrical Engineering and Information Technology earned at Chemnitz University of Technology
  • International and German students holding at least a Bachelor's degree in an equivalent academic field who wish to deepen and specialise their knowledge before entering industry or academia.
Course organisation

Compulsory (obligatory) subjects (50 credits):

  • Semiconductor Physics / Nanostructures (semester 2, lecture/seminar)
  • Design of Heterogeneous Systems (semester 2, lecture/seminar/lab)
  • Technologies for Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
  • Advanced Integrated Circuit Technology (semester 2, lecture/seminar)
  • Microsystems Design (semester 1, lecture/seminar/lab)
  • Micro and Nano Devices (semester 1, lecture/seminar/lab)
  • Reliability of Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
  • Materials in Micro and Nano Technologies (semester 1, lecture/seminar)
  • Smart Sensor Systems (semester 1, lecture/seminar/lab)

Elective (optional) subjects:
Students have to elect and pass subjects from the following catalogue in order to earn 20 credit points (CP):

  • Microscopy and Analysis on the Nano Scale (semester 2, lecture/seminar) – 5 CP
  • Surfaces, Thin Films and Interfaces (semester 3, lecture/seminar) – 5 CP
  • Optoelectronic Devices (semester 3, lecture) – 5 CP
  • Power Semiconductor Devices (semester 3, lecture/seminar) – 7 CP
  • Test of Digital and Mixed-Signal Circuits (semester 1, lecture/seminar) – 5CP
  • Fields and Waves (semester 2, lecture/seminar) – 5 CP
  • Next Generation Internet (semesters 1 & 2, lecture) – 5 CP
  • Advanced Mobile Networks (semesters 1 & 2, lecture/seminar) – 5 CP
  • Micro Optical Systems (semester 2, lecture/seminar) – 3 CP
  • Integrated Circuit Design – Transistor Level (semester 2, lecture/seminar/lab) – 5 CP
  • Numerical Methods for Materials and Reliability of Micro and Nano Systems (semester 2, lecture/seminar) – 5 CP
  • Failure Analytical Methods for Micro and Nano Systems (semester 3, lecture/seminar) – 5 CP
  • Flexible Electronics (semester 2, lecture/seminar) – 5 CP
  • Modern Battery Materials (semester 2, lecture/seminar) – 5 CP
  • Automotive Sensor Systems (semester 2, lecture/seminar) – 5 CP
  • Sensor Signal Evaluation Modern Battery Materials (semester 3, lecture/seminar) – 5 CP

Research project (obligatory, to be done at the university) – semester 3 – 20 CP

Master's thesis (obligatory, to be done at the university) – semester 4 – 30 CP

A Diploma supplement will be issued
Yes
Course-specific, integrated German language courses
No
Course-specific, integrated English language courses
No
Tuition fees per semester
None
Semester contribution

All students have to pay a semester contribution of approx. 340.50 EUR. This fee also covers the semester ticket, which permits you to use buses and trams in Chemnitz as well as regional trains throughout Germany during the semester. International students will receive the bank account details after admission with which they can transfer the semester contribution. However, the fee can also be paid after arrival in Chemnitz (by German bank card or transfer).

Costs of living

Approx. 970 EUR per month to cover personal expenses

Funding opportunities within the university
Yes
Description of the above-mentioned funding opportunities within the university

Incoming students can apply for different funding opportunities via the International Office of Chemnitz University of Technology. More information can be found at: https://www.tu-chemnitz.de/international/incoming/stipendien/index.php.en.

Academic admission requirements
  • Bachelor's degree in Electrical Engineering and Information Technology ("Bachelorstudiengang Elektrotechnik und Informationstechnik") received from Chemnitz University of Technology
  • Equivalent degree (decision by the board of examiners)
German language skills
A1 required, please provide an official language certificate, e.g.:
  • telc Deutsch: telc Deutsch A1
  • ÖSD Zertifikat: A1
  • Goethe-Zertifikat: Goethe-Zertifikat A1
English language skills
B2 required, please provide an official language certificate, e.g.:
  • TOEIC: 785
  • Reading: 385
  • Listening: 400
  • Speaking: 160
  • Writing: 150
  • TOEFL iBT (before 2026): 72
  • Reading: 18
  • Listening: 17
  • Speaking: 20
  • Writing: 17
  • telc English: telc English B2
  • Cambridge English Qualifications Business (BEC) : B2 Business Vantage
  • PTE Academic: 59
  • Cambridge English Qualifications: B2 First
  • UNIcert® English: UNIcert® II
  • TOEFL iBT (since 2026): 4
  • Reading: 4
  • Listening: 4
  • Speaking: 4
  • Writing: 4
  • IELTS Academic: 5.5
Application periods
The following is valid for applicants from: all countries
For the winter semester:
1 April - 15 July
More information on application periods
Please find more details on this website.
Submit application via
Please apply via uni-assist.
Possibility of finding part-time employment

Students can find offers for part-time jobs, work placements, etc. on the job portal offered by the Career Service of Chemnitz University of Technology: https://www.tu-chemnitz.de/career-service/jobboerse/.

Accommodation

The "Studentenwerk" Chemnitz-Zwickau runs several student residences. International students can apply for a single room in one of the residences. The prices depend on the size and furnishings of the room and vary between 270 EUR and 350 EUR: https://www.swcz.de/en/student-housing/our-halls-of-residence/.

Career advisory services and programmes for future professionals

The Career Service of Chemnitz University of Technology supports students during their studies as well as graduates entering their professional life. The Career Service provides a platform for companies and institutions to present themselves: https://www.tu-chemnitz.de/career-service/index.php.en.

Support for international students and doctoral candidates
  • Buddy programme

Chemnitz University of Technology

University location

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